Metrology

© MNF

Scanning Microscope (LSM)- Keyence VK-X

  • Digital optical Microscope
  • 2D Measurements for structures >100nm
  • Measure surface topology through:
    • focus variation
    • confocal laser scanning
    • white light interferometry
  • Height resolution: (few) mm down to (few) nm (depending on method)

Contact: Stefan Ostendorp

Location: CeNTech II Lab 1.04

© Uni MS / MNF

Time-of-Flight- Secondary Ion Mass Spectroscopy (TOF-SIMS) - Cryo-IONTOF M6 Special Edition

  • Time-of-flight analyzer for mass resolution up to 30000, mass accuracy of a few ppm
  • Bismuth liquid metal ion gun (30 keV) for high resolution (< 70 nm) imaging
  • Argon gas cluster ion gun (5 to 20 keV) for analysis and molecular depth profiling
  • Dual beam ion gun (0.25 to 2 keV, Ar+, O2-, Cs+) for depth profiling
  • Cryogenic sample handling for analysis of hydrated samples
  • Programmable sample heating and cooling (-180 to 600 ˚C)
  • High speed sample rotation stage for high resolution depth profiling

Contact: Bonnie Tyler

Location: SoN, Lab 110.037

Safety instructions [de]

Safety instructions [en]

© Jonas Schütte / MNF

Ellipsometer - Woolam M-2000

  • Excels in both general purpose thin film characterization (i.e., film thickness, optical constants) and large-area uniformity mapping
  • Covers the wavelength range from 370 nm – 1690 nm
  • Measures angle range 55° – 85° with automated tilt stages
  • Fine measurement capable with focus probe, with a spot size of 100 um
  • Automated alignment

Contact: Riya Gupta

Location: SoN, Nanochemistry zone

Safety instructions [de]

Safety instructions [en]

© Jonas Schütte / MNF

Atomic Force Microscopy (AFM)- NanoScope Icon, Bruker

  • XY scan range: 90μm x 90μm typical, 85μm minimum
  •  Z range: 10μm typical in imaging and force curve modes, 9.5μm minimum
  • Pixel density image up to 5120x5120
  •  Z sensor noise level in closed loop:
    • 35pm RMS typical imaging bandwidth (up to 625Hz);
    •  50pm RMS, force curve bandwidth (0.1Hz to 5kHz)
  • Z range 10μm typical in imaging and force curve modes, 9.5μm minimum
  • Temperature-control and thermal analysis from - 35°C to 250°C
  • AFM modes: Standard: ScanAsyst, PeakForce Tapping, TappingMode (air), Contact Mode, Lateral Force Microscopy, PhaseImaging, Lift Mode, MFM, Force Spectroscopy, Force Volume, EFM, Surface Potential, Piezoresponse Microscopy, Force Spectroscopy; Optional: PeakForce QNM, HarmoniX, Nanoindentation, Nanomanipulation, Nanolithograpy, Force Modulation (air/fluid), TappingMode (fluid), Torsional Resonance Mode, Dark Lift, STM, SCM, C-AFM, SSRM, PeakForce TUNA,TUNA, TR-TUNA, VITA

Contact: Riya Gupta

Location: SoN, Bio-AFM zone

© Jonas Schütte / MNF

Atomic Force Microscopy (AFM)- Bioscope Resolve, Bruker

  • Inverted light microscope
  • X-Y Scan Range ≥100 μm, open-loop or closed-loop operation
  • Z Scan Range ≥15 μm, open-loop or closed-loop operation
  • Deflection Detection IR superluminescent diode (SLD) λ=850 nm
  • Baseline Tilt <0.25 nm/μm
  • XY Sensor Noise <150 pm
  • Height Noise 35 pm (typical with appropriate vibration and acoustic isolation)
  • XY Sample Stage Motorized stage with 10 mm x 10 mm range

Contact: Riya Gupta

Location: SoN, Bio AFM zone

© Uni MS / MNF

Atomic Force Microscopy (AFM)- Nanowizard 3, JPK-Bruker

  • Soft and hard materials, biological samples (in liquid)
  • Zeiss inverted light microscope
  • Resolution: 1-2 nm
  • Comprehensive force measurement from single molecules (suppliers claim) to living cells
  • Z sensor noise level better than 35 pm RMS
  • Motorized stage with 20mm2 x 20mm2 travel range

Contact: Steffen Lohrmann

Location: SoN, SNOM zone

© Jonas Schütte / MNF

Probe Station- Cascade MPS150

  • Manual electrical probing of individual devices
  • Contact submicron features
  • Chuck ready for single DUT
  • Vacuum positioners with 1 μm feature resolution
  • DPP450 positioner with nanometer resolution and accuracy

Contact: Mostafa Amirpour

Location: CeNTech II, electronic lab, room 2.16b