1. Bachelor and master students are allowed to access the MNF cleanrooms provided they are accompanied by an authorized user with at least 30 hours cleanroom experience. The authorized user, in this case, has to inform the student about the cleanroom regulation and watch over the student to minimize any risk of damage, contamination and safety issue.
2. Bachelor and master students are allowed to access an MNF laboratory provided they are accompanied by their supervisor who has at least 20 hours experience with the instrument(s) in that laboratory. The authorized user, in this case, has to inform the student about the MNF general regulations and watch over the student to minimize any risk of damage, contamination and safety issue.
3. It is possible that Bachelor and master students work independently in the MNF’s cleanrooms or laboratories if their supervisor send a request to the MNF admins and their case is approved by them . MNF reserves the right of refusing this request.
4. The MNF admins have to be informed per E-Mail, at least 24 hours in advance about the presence of Bachelor and master students for one-time operation. The MNF admins have the right to refuse the authorization for hosting students.
5. Students can access the cleanroom only during the regular opening time.
1. External or WWU technicians and Engineers are allowed to enter the MNF cleanrooms only if they are accompanied by the MNF staff or by an instrument manager.
2. MNF admins must always be informed about the visit of a technician or an engineer at least one day in advance. It is the right of the MNF admins to reject such a visit if they have a concern about interfering this visit with other functionalities of the Facility.
3. Prior to access the cleanroom area, the technician or the engineer has to be informed by the accompanying person mentioned above about the MNF safety regulations and if applicable, cleanroom procedure.
For long duration works and only after authorization of the cleanroom manager, the technicians or engineers are allowed to work alone in the cleanrooms only if their work is compliant with the cleanroom and safety regulation and if exclusively operating on the instrument or apparatus of their competence.
5. Technicians and engineers can access and work inside the cleanrooms only during the regular opening time, with no exception.
1. The MNF cleanrooms and laboratories can be accessed by authorized users, guest/visitors and technicians during the regular opening time, which is from Monday to Friday from 8:00 AM to 6:00 PM.
2. MNF is closed to all users on national and North Rhine-Westphalian regional holidays.
Users who need to work in the MNF CenTech I and SoN cleanrooms during off-hours must be compliant with the following requirements:
1. They must have accumulated at least 30 hours of cleanroom experience.
2. They must be accompanied or remotely reachable by a cleanroom experienced user which has the responsibility of checking up on them at least once per hour.
3. They must inform the MNF admins per E-Mail and at least 24 hours in advance. In the E-mail they should indicate the instruments used, the operation which will be performed after hours and the name of the overseeing colleague. Also the user should send an E-Mail to the MNF admin when effectively entering the cleanroom and when leaving.
4. The MNF admins have the right to refuse the authorization for after hours work if the operation requires higher level of surveillance or assistance.
5. The use of dangerous gases and dangerous chemicals is prohibited during after hours. Dangerous gases include all the gases except for: N2, Ar, O2, SF6, CF4, CHF3. Dangerous chemicals include all the explosives, corrosive and toxic chemicals.
For accessing an MNF laboratory, the users must have accumulated at least 20 hours of experience with the targeted instrument in the laboratory. The general WWU regulations for after-hour work in the laboratories are as well applicable for the MNF laboratories.
1. Independently of the working group, position and status, when accessing the cleanroom is mandatory to follow the safety and cleanroom regulation and respect any kind of decision taken in case of violation.
2. Users shall strictly follow the enter and exit procedure regarding how to wear the cleanroom garments.
3. Users are not allowed to deactivate, modify, tamper or misuse the safety equipment and apparatus present inside the cleanroom, grey rooms and the gowning room.
4. All doors must remain closed when not entering or exiting. It is absolutely prohibited to put any kind of object which can obstruct the proper closing and/or opening of the doors.
5. In the SoN cleanroom, it is strictly forbidden to get to the grey area directly from the cleanroom zones except in case of emergency.
6. The normal users are not allowed to reach the grey area of the SoN cleanroom except for the passage from the gowning room to the personnel locking room. Instrument managers can reach the grey area for the maintenance purposes.
7. Users should report to the cleanroom and instruments managers any user conflicts and misbehaviour.
1. No items which aren’t strictly related with the fabrication are allowed inside the cleanroom.
– No personal locker is provided in the CenTech I and II cleanrooms, therefore all the personal and valuable items should be stored outside the cleanroom and the gray room areas. Valuable personal items are allowed only if not in direct contact with the skin, and if never removed from beneath the cleanroom garments.
– In the gowning room of the SoN cleanroom, small lockers are available to the users only for the duration of their presence in the cleanroom. These lockers should not be used for the purpose of long term storage. There are larger lockers available in the SoN institute on the ground floor room (XXX) for the MNF users. The users can get the key to these lockers from the SoN secretary. Maximum duration for using these lockers is 24 hours.
– The above-mentioned lockers in the SoN institute are provided for the convenience of the MNF users and neither MNF organization nor the SoN institute is liable in case of loss of valueable items.
2. Eating, smoking, gum-chewing, sniffing are not allowed in the cleanroom. Furthermore, no food and drinks are allowed in the cleanroom, gowning room and in the grey areas. Electronic cigarettes are also prohibited.
3. Because of the high particles release, it is required that all smokers, after smoking a cigarette, drink a full glass of water and wait at least 30 minutes before accessing the cleanroom.
4. Users should not wear any cosmetics, including rouge, eye shadow, eyebrow pencil, mascara, eye liner, false eye lashes, perfume and hair products (gel, hairspray...) in the cleanroom.
5. Safety and behavioural regulation requires that users are suitably attired with long pants/trousers and full-coverage shoes. Long arms T-Shirts or shirts are recommended but not mandatory. Boots, sandals, flip-flops and high heels are prohibited.
6. Users are required to wash their hands before and after accessing the cleanroom.
7. All items which are needed to be brought inside the cleanroom (tools, sample boxes, etc...) should be wiped with IPA prior to the entrance. Where present, a transfer hatch should be used.
8. All the plastic packages of the items which are to be entered the cleanroom should be removed from the item and the main item needs to be cleaned with IPA prior to enetring them to the cleanroom.
9. Before bringing any material such as chemical bottles make sure that their label is covered with a plastic layer and therefore it can be cleaned. If the label is made out of paper, cover it with plastic covers or transparent tapes and wipe them thoroughly.
10. Only cleanroom-compatible stationary and other commodities including pens, markers and wipes are allowed in the cleanroom areas. These items are provided by MNF and the users should not bring any of such materials, even if they are cleanroom compatible, to the cleanroom.
11. Cleanroom compatible notebooks can be ordered to the MNF with a charge for each user or user group. It is not possible to use any other papers inside the cleanroom. If a paper or a notebook is taken out of the cleanroom area, it is not allowed to bring them back again.
12. Users with physical illness, especially in case of respiratory disorders, should not enter the cleanroom. Coughing and sneezing are especially highly contaminating.
13. Users under the effect of any substance that can affect their concentration (alcohol, drugs, stimulants,...) are not allowed to access the cleanroom.
14. In case of pregnancy, users should avoid entering any of the MNF cleanrooms and the laboratories of instruments with an electron column.
Cleanroom Garments
1. Only the provided cleanroom garments and accessories should be worn when entering the cleanroom. Most importantly, users should never access the inside of the cleanroom garments while working in the cleanroom area.
2. The garments are shared in a pool system between the users, for this reason users must pay the highest attention on avoiding contamination of the garments during and after use. Users must follow high hygienic and sanitary requirements in order to avoid transmission of disease when sharing the clothes. Users with skin-transmissible disease are allowed to access the cleanroom only with disposable garments.
3. Wearing cleanroom garments outside the cleanroom areas is strictly forbidden.
4. The cleanroom garment include:
• single-use shoe cover
• single-use hairnet
• disposable face mask with reusable clip
• head cover
• overall
• over boots
• disposable gloves
• safety goggles
5. The safety goggles may not be used only if not working with chemicals.
6. Not wearing one of these components of the garment will be interpreted as an intended violation of the cleanroom safety regulation.
7. The garments are replaced with cleaned ones on weekly basis. The users are invited to check whether a garment of a suitable size is available on the hanger in the gowning. If not, they are allowed to open a new set of garment.
8. Short-term guests and visitors are invited to use disposable garments which can be found in the garments cupboard.
9. Non-MNF technicians and engineers who are supposed to work in the cleanroom for more than three hours and/or have high level of mobility can use the washable garments. In this case, the garments should be labeled with their name. When the job is finished, the accompanying instrument manager or staff is asked to remove this garment and put it in the dirty cloths collection box.
Step by step in the gowning room
1. Wear a disposable hairnet and the shoe cover, keeping the street-shoes on. When wearing the disposable shoe cover, make sure not to be in contact with the floor. With the overshoes on, rotate your body in order to cross the bench to the clean side of the room.
2. Put on the garments using a top-down procedure.
3. First, wear the single usage face-mask. Make sure to use the provided clip to better ensure a full protection of mouth and nose. People with beard, should put special attention on fully covering the beard areas with the mask.
4. Wear the garment’s head cover. Make sure that you closed completely the zipper and the buttons and tighten the clips. Make sure that no hair is visible.
5. Wear the overall. Make sure that the overall sleeves don’t touch the floor or any kind of surface. Close completely the zipper and buttons and check that the overall covers the lower part of the head cover.
6. Wear the over boots. Use the inner button to fix the over boot to the overall. Close the buttons and the the clips and make sure that each boot is properly tighten, since risk of accidental fall might occur.
7. Wear the gloves and make sure that they cover the overall cuffs.
8. Wear eye protection.
9. Check that the whole garment is correctly worn before accessing the cleanroom.
10. Step onto the last tacky mat and enter the cleanroom.
1. Users should walk slowly and avoid any kind of fast motions in the cleanroom.
2. Sitting or leaning on equipment or work surfaces is prohibited.
3. Avoid over crowding one part of the cleanroom in order to prevent an increase in local contamination.
4. Writing on equipment or garments is forbidden.
5. The cleanroom is a working place and users are invited to behave seriously and professionally. Users must behave respectfully and politely with all the other users, managers, technicians and cleaning personnel.
6. Users should clean the working environment and keep it clean during and after operation.
7. If the over boots get loosen, the user needs to change their gloves after fixing them.
8. It is not allowed to use chemicals and/or materials which belong to other users/working groups without prior consent.
9. It is forbidden to move instruments, consumables, tools from one working area to another without the prior consent of the instrument or MNF managers.
10. It is prohibited to change the instruments limitations settings (hot plate max. temperature, gases pressure, etc.).
11. The instrumentation cannot be left unattended and the users should always be present in the cleanroom area when running a process.
12. Except for the cleanroom and instruments managers and authorized technicians, it is absolutely forbidden to repair or make maintenance operations on the cleanroom instruments and facility.
1. Remove your cleanroom garments using a bottom-up procedure. First the gloves, then the boots, then the overall, then the head-cover.
2. Place the eye protection in the dedicated location.
3. Make sure you close zip, buttons and clips when hanging the overall, avoiding any contamination by contact with the floor or other surfaces.
4. Sit onto the sit-over bench and pass onto the other side. Dispose the single-use hairnet, mask and shoe cover. The mask clip, instead, has to be placed in the proper container for future usage.
1. To work only inside the control room or at the operator PC only, it is not necessary to wear the cleanroom garment but a lab coat only. Lab coats can be found on the hanger and are periodically replaced with cleaned ones. If your size is not available, please open a new set which you can find on the top shelf of the hanger. If anything is damaged, dirty or missing, please contact the mnfadmin.
2. When operating with chemicals, gloves and eye protection should be worn.
3. To access the E-Beam Room E.06, full cleanroom garment is needed. Please refer to section 2.1.3 for the detailed procedure.
1. Samples to be processed or characterised, and chemicals (with prior approval) are allowed to be brought inside the cleanroom.
2. Users must ensure that the samples and the material, their composition and any previous process on them are conformed with the cleanness of the cleanrooms and the MNF instruments.
3. It is forbidden to bring any type of paper (even cleanroom-compatible papers), pen or pencil and plastic bags into the cleanroom. Each user, or user group can purchase a cleanroom notebook from the MNF. If these notebooks are taken out of the cleanroom, it is not possible to bring them again back to the cleanroom.
4. Tweezers and cleanroom compatible pens and markers are provided in the cleanrooms, however users are allowed to bring their own tweezers if needed. In this case, the tweezers should undergo the procedure explained below.
5. Procedure:
– SoN cleanroom: Before entering the gowning room, take the materials to the "material transfer zone". Wear a pair of gloves and with a wipe and the provided cleaning solution, clean the item properly. Open the transfer hatch, put the item on a clean wipe and close the transfer hatch.
– CenTech I cleanroom: The transfer hatch can be accessed from gowning room. After the gowning, wear a pair of gloves and with a wipe and the provided cleaning solution, clean the item properly. Open the transfer hatch, put the item on a clean wipe and close the transfer hatch.
– CenTech II cleanroom: There is no transfer hatch in this cleanroom. Leave the item on the sit-over bench. Once you are on the clean side of the room and with a proper gowning, clean the sample using a wipe and the provided cleaning solution and transfer the item directly to the room.
1. Workstations connected to the internet are present in the cleanroom area.
2. Users are allowed to use these workstations for work-related only purposes. Personal E-Mail check, newspaper reading or any other kind of personal use of the workstation is prohibited. In case of long waiting time for processes, personal electronic devices can be used for this purpose, only if this doesn’t compromise the safety of the users and the regular operation of the instrumentation.
3. It is not allowed to save files on the MNF workstations. The use of external hard drive is also prohibited. Users should always connect to the server or use cloud storage system allowed by the WWU. MNF users can also access and stored data in a personal folder in the p0mnf university server.
4. It is allowed to use smartphones and tablets inside the cleanrooms with the following instructions:
– CenTech I and SoN cleanrooms: The user’s cover should be removed and the device should be disinfected in the gowning room by the provided disinfecting solution and a wipe. The device should be placed in special covers which are available in the gowning and should be carried by the user to the cleanroom. Opening the cover to reach the device inside the cleanroom is forbidden. The covers provide enough touch sensitivity to the display.
– CenTech II cleanroom: The user’s cover should be removed and the device should be cleaned and disinfected in the gowning room by the provided disinfecting solution and a wipe.
5. Laptop or computers with cooling fan are not allowed in the cleanroom.
6. Music player and any kind of entertainment system are not allowed in the cleanroom since they can interfere with the safety alarms perception.
7. It is not allowed to remotely connect to the cleanroom apparatus and workstations. Only instruments manager are allowed to use remote access after the approval of the MNF admins.
1. Only the wipes provided by the MNF can be used in the cleanroom. They can be found in the dispensers which are positioned in each cleanroom zone.
2. Disposal of wipes:
- If wipes are contaminated with polymers (resists), you can directly dispose of them in the contaminated waste container (blue barrels).
- If they are wet from IPA, ethanol or water, you can throw them away in the general waste bin (metallic with a pedal). If the wipes are extremely wet, they have to be pressed by hand before being disposed of.
- If they are wet in Acetone or other solvents that can dissolve the plastic liners in normal garbage bins, you can leave them in the fume hood so that they dry out and the next user can dispose of them in the general waste bin.
- When you work with acids and bases, if the wipes get contaminated by the chemicals, they should normally be cleaned with water, pressed well, and disposed of in the contaminated waste container (blue barrels).
3. Do not leave any used wipes on working surfaces.
4. Do not use wipes in the vicinity of hot-plates.
1. Clean glassware can be found in the cabinets in the preparation room (CenTech I) and in the drawers in the Inorganic-chemistry and Photolithography zones (SoN).
2. After using glassware:
– SoN cleanroom: should be transferred to the "dirty glassware" container located on the trolley in the cleanroom corridor.
– CenTech I cleanroom: should be transferred to the glassware washer in the Development zone using small white trays. The trays should be brought back to the preparation zone. If the dishwasher is full, the user should run the machine. If the machine is running, the user can leave the dirty glassware in the provided tray in the development zone. The user who finds the dishwasher finished is kindly asked to transfer the clean glassware to the preparation zone.
1. When working with chemicals the users should follow the DGUV Information 213-851 on how to work safely in laboratories. A copy of the regulation can be found here: http://bgi850-0.vur.jedermann.de/index.jsp
2. It is forbidden to store or run any process which involves acids in the CenTech I cleanroom.
3. In order to use acids (except HF), the dedicated wetbench in the inorganic-chemistry zone in the SoN cleanroom can be used. For the processes involving HF, users can reach the chemistry lab in the CenTech II building. Note that this laboratory is not a cleanroom.
4. Acetone, IPA and ethanol are provided by the MNF. These chemicals are typically present in each fume hood inside the proper dispenser. If the dispensers are empty, the users should fill them with the corresponding chemicals. These chemicals can be found in:
– SoN cleanroom: in the safety cabinet in the inorganic-chemistry zone. The empty chemical containers should be first left open under a wet bench so that the left over solvent is evaporated and then placed in the lower shelve of the cleanroom trolley in the cleanroom corridor.
– CenTech I cleanroom: the chemicals cupboard under each fume hood. If not, the other supply is in the two top shelves of the chemicals cupboard in the deposition zone. The empty chemical containers should be transferred to the entrance area of the gowning room.
5. All the other chemicals have to be self-managed by the users and the groups.
6. If not already present, the user/group should send, prior to bring it to the cleanroom, a chemical safety datasheet to the MNF admin. This datasheet will be uploaded in the MNF website.
7. All chemicals have to be labelled indicating the chemical name, the chemical composition, the hazard statements and pictogramme, the date of the entry, the name of the working group and the user.
8. A color-coded label indicating the waste category has to be attached to each chemical bottle:
– Acid: red, – Base: black, – Solvent: white.
9. Storage of the chemicals:
– SoN cleanroom: All the chemicals should be stored in the chemical cabinet in the Inorganic-chemistry zone.
– CenTech I cleanroom: New solvent bottles have to be stored in the chemicals cupboard in the Deposition zone. Resists have to be stored in the resist cupboard next to the fume hood in the Preparation zone. Bases have to be stored in the base cupboard next to the fume hood in the Preparation zone. If the space allows, open solvents bottles can be stored under the fume hoods chemicals cabinets.
10. It is forbidden to use, without prior consent, the chemicals of the other users or work groups.
11. Bottles and chemicals should be transported using the metallic buckets. The buckets are available next to the transfer hatches.
12. Never leave unlabelled chemicals unattended. This is especially true for chemicals used during regular operation. Always write your name, phone number and the name of the chemical on a piece of cleanroom compatible paper (available in the cleanroom) and stick it in front of the working area.
Prior to the operation, the user should check whether waste containers with enough capacity are available or not. If not, they have to contact the Safety officer or the mnfadmin.
Solid waste
There are different schemes for collecting the solids wastes based on the following categories:
– Contaminated wastes: All materials that were in touch with acid, base and polymers should be considered to be contaminated. These materials should be disposed in blue barrels which are available in the Preparation, Inorganic-chemistry and Photolithography zones. In the Inorganic-chemistry zone, there are two blue barrels available for acid and base wet benches.
– Sharp objects: Broken samples should be disposed of in the dedicated containers in each cleanrooms. Other sharp objects such as broken glassware should be disposed of in the contaminated waste bins (blue barrels).
– Pipettes: disposable pipettes should be disposed of in the contaminated waste bins (blue barrels). Pipette tips should be collected in the dedicated sharps bins or reggie bins (available in each of the allowed wet benches).
– Uncontaminated waste: All other materials are considered uncontaminated and they should be disposed into metallic pedal bins. Slightly wet to dry wipes that have only be in contact with IPA, Acetone, Ethanol and water and nitrile gloves that were not in direct contact with the contaminated chemicals are suggested to be considered in this category.
Liquid waste
1. Under each wet bench, liquid waste containers for solvents, acids and bases based on the application of the wet bench are available.
2. High concentrated acids or bases need to have their own dedicated waste container. Do not dispose a high concentrated acid or base in the waste container of other acids or bases! Users should check the availability of the suitable waste container before they start their operation.
3. Liquid waste containers should not be filled more than 3/4 of their total capacity.
4. Users are responsible for transporting full liquid containers to:
– SoN cleanroom: Trolley
– CenTech I cleanroom: the chemical cupboard in the Deposition zone. and to inform the safety office or the MNF admin about the full container.
5. Empty waste containers are available in:
– SoN cleanroom: below the acid wet bench in the Inorganic-chemistry zone. – CenTech I cleanroom: the chemical cupboard in the Deposition zone.
6. Users should properly label each new waste container.
7. For any further question concerning the waste management, please refer to the safety officer.
The following procedures should be followed in case of a chemical spillage:
– If the spill hits the operator or other users:
1. Users personal safety is of the most importance.
2. If possible, the user should evacuate the cleanroom and inform the other users about the presence of a chemical spill.
3. The contaminated clothing should be removed and the affected skin area cleaned. If the chemical is a strong base or acid, the affected area should be rinsed with water for 10-20 minutes. A body shower is available in:
– SoN cleanroom: in the cleanroom corridor (two showers)
– CenTech I cleanroom: the corridor outside of the cleanroom, next to to the cleanroom door.
4. If any chemical comes in contact with or around the eyes, they should be washed with lots of water. Eye showers are available in the zones where wet benches are present.
5. The user should call the mnfadmin or an experienced colleague for assistance.
– If the spill does not affect anyone and all the users are in safe conditions:
1. Spill kits are required to be used. Spill kits are available in each zone where wet benches are present. The exact location is indicated with the corresponding sign.
2. Wearing protective gloves and in the case of acids or bases, face shield and apron is necessary before trying to clean the spill.
3. The area around the spill has to be isolated using the absorbent pillow and the tissues in the spill kit to prevent spreading.
4. The user must inform as soon as possible the MNF staff or, in case of absence, one of the instruments managers. The user must report the chemical composition of the spill, the amount and if people or instruments have been involved.
5. If the spill is a solvent or has a strong odour, the cleanroom should be evacuated.
6. The contaminated surfaced must be cleaned with water once the spill has been completely soaked up.
7. If any glassware is broken, the user should be very careful in removing them.
The purpose of the MNF regulations is to guarantee a safe and functional working environment.
2. In case of violation, the MNF has the right to limit or revoke the status of a user, which include the access to instrumentation, booking system and MNF server. The MNF can use the data present on the MNF server or in the workstations as a proof of violation and/or delete them without being obliged to make any backup.
5. Knowingly granting access to MNF laboratories or cleanrooms to a person that is suspended or permanently excluded from the MNF will result in suspension of MNF access of at least 1 month.